| Project | Specification Description |
|---|---|
| Dimensions | W1440XD1260XH2250 |
| Wafer Input/Output | 300mm FOUP 25pcs(SEMI E47.1)、FOSB 25 pcs(SEMI M31) or 300mm FOUP with 8’Open Cassette/SEMI Standard : E47.1, E62 |
| Wafer Size | 200mm-300mm, Thickness0.4-1.0 mm |
| Throughput | 200pcs/H |
| Clean Level | ISO Class2 (FFU) |
| Load Port | 2 Port |
| Clean Level | 500Kg |
| Utilities | Power:AC220V50HZ/Dryair:0.5MPa+10%/Vacuum:>-53KPa |
