The process supports automatic loading into trays and coin boxes via SECS and local recipe commands respectively

Packaging includes wafers, trays, foam pads, and discs as buffering materials

Content identification involves reading

Cassette ID: One-dimensional/two-dimensional code

Wafer ID: OCR

Cleanroom level: Class 100

UPH < 500 (calculation condition: 2 foam pads, 12 wafers, 1 spacer disc)