| Project | Specification Description |
UPH | >60pcs |
Frame /Carrier Transfer | Vacuum suction/electric grip/cylinder |
Placement Accuracy | ±0.05mm |
| Frame Size | ≤250x250mm square frame |
| Scanning Accuracy | >99.99% |
| Clean Function | Lon knife cleaning |
Loader/Unloader for Sputtering System
Corresponding to the loading and unloading of different types of sputter machine, it is suitable for handling wafer frames or square frames up to 12 inches size and can be used to transfer materials between the front and rear buffer stages of sputter.
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